​(512) 931-2701

 ​​​​​​​ESP works directly with Semiconductor Equipment Engineers and Technicians to develop (reverse engineer) parts and provide repairs that will reduce COO, increase MTBC and improve quality.  We provide spare parts and repairs for Semiconductor OEM equipment such as ASML, AMAT (Applied Materials), Axcelis, Brooks, DNS (Screen) Gasonics, LAM, Mattson, MKS, Novellus, TEL (Tokyo Electron), VAT, Varian and many more.


ESP Spares, Inc.

300 Park Central Blvd. Ste. B

Georgetown, TX (USA) 78626

Phone: (512) 931-2701

Email: sales@espspares.com



Non-consumable parts for AMAT TEL LAM equipment tool sets
Spare parts for semiconductor manufacturing equipment
Refurbishment Services reduce increase life cycle of wafer production equipment
ESP Spares LinkedIn page - Connect with us!

​​​​ESP Spares is a solutions-driven manufacturer serving the semiconductor manufacturing industry. 

We provide precision spare parts and consumables, superior repairs and refurbishments, and custom fabricated solutions for wafer fab equipment. we support toolsets for the cmp, cvd, etch, diffusion, implant, Photo and pvd process groups 

Our team, facilities, and technology partners allow us to provide quality products and services that will exceed your expectations.