Anodizing is an essential process for several parts in semiconductor toolsets. The primary purpose is to create an insulating dielectric layer. However, it can also increase corrosion resistance and wear resistance.
ESP will ensure your requirements are met including alloy compatibility, anodic type selection (Type I, Type II, Type III), thickness, and color.
The demand for fluoropolymer coatings continues to grow in the industry. The strong carbon-fluorine bond found in fluoropolymers gives them excellent resistance to highly acidic and corrosive environments. They can withstand high temperatures, reduce part friction, and increase electrical resistance.
ESP can offer multiple fluorpolymer coatings such as PVDF, ETFE, FEP/PFA, PEEK, and PBI.
ESP Spares, Inc.
300 Park Central Blvd. Ste. B
Georgetown, TX (USA) 78626
Phone: (512) 931-2701
Surface roughness is becoming increasingly more important for semiconductor parts and equipment, particularly gas delivery systems. Improved surface roughness lowers byproduct adhesion, reduces friction, and facilitates the cleaning of these systems.
Multiple methods exist including manual polishing, electropolishing, and abrasive flow machining (extrude honing). ESP can help you find the best method for your application.
Ceramic coatings provide parts and equipment with an effective barrier to the harsh chemical environments that are created in the process chamber. However, these coatings will eventually be consumed themselves and recoating is required.
ESP can provide high-purity plasma-sprayed ceramic coatings including alumina (Al2O3), yttria (Y2O3), and more.