The OEM failed to shield several electronic components around the tool with protective panels. The exposed equipment, coupled with very little space between tools, lead to accidental contact when performing maintenance activities on adjacent tools. This accidental contact resulted in mis-processing and product scrap.
ESP Spares, Inc.
300 Park Central Blvd. Ste. B
Georgetown, TX (USA) 78626
Phone: (512) 931-2701
Vigus Electronics Panel
Vigus electronics panels are used on 300mm etch tools. These panels protect various electronic equipment, such as power supplies and controllers, from accidental contact.
ESP developed custom panels to protect the sensitive electronics and prevent further accidental contact. The panels were powder-coated with a color that matched other tool paneling and included panel captive screws.