ESP developed a turn-key refurbishment process that completely removes the worn ceramic coating and then deposits a new coating. The refurbishment process includes part detailing, re-surfacing (if needed), re-anodization (if needed), and UHV cleaning. This refurbishment has been developed for both alumina and yttria coatings. With this process, ESP has been able to drastically extend part lifetimes and decrease PM costs.
The upper electrode is used in the process chamber of a 200mm etch tool. It acts as a gas distribution plate, which distributes and delivers process gases evenly within the chamber and across the wafer. These gases will be used to create the etch plasma.
ESP Spares, Inc.
300 Park Central Blvd. Ste. B
Georgetown, TX (USA) 78626
Phone: (512) 931-2701
Due to the aggressive nature of etch plasmas, the ceramic coating on the upper electrode is eventually consumed and the entire part must be removed from service.