​(512) 931-2701

Solutions

ESP worked with the customer to modify the existing design. Changes to the OEM design included shifting the cone back on the part and adding a contact pad for to minimize backside defects. The end result is a modified part that decreases defects, extends longevity, and reduces costs.

OUR LOCATION

ESP Spares, Inc.

300 Park Central Blvd. Ste. B

Georgetown, TX (USA) 78626

Phone: (512) 931-2701

Email: sales@espspares.com

​www.espspares.com

Issues

The OEM design had several issues that ultimately led to excessive wear, unnecessary particle generation, and the frequent replacement of these parts.

ESP worked with the customer to improve on the OEM design which was causing excessive wear, unnecessary particle generation, and frequent parts replacement.

LL pedestal cones are used in an outbound cooling chamber of a 300mm CVD tool. After processing, the wafer is transported to the cooling chamber and placed on five pedestal cones equally spaced around the chamber. The wafer remains here until it has reached the desired temperature.

Case Study 1- Part Redesign

LL Pedestal Cones


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