Electrostatic chucks (ESCs) are used in the process chambers of a majority of semiconductor toolsets. As the name implies, these assemblies are used to chuck, or hold, wafers electrostatically during processing.
ESCs are constantly exposed to process gases and byproducts and become dirty over time. This can cause them to generate particles, develop leaks, or fail to properly chuck wafers. Thus, they must be cleaned frequently. However the cleaning process can be extremely difficult, tedious, and time consuming.
ESP developed a custom tool to aid in the ESC cleaning process. The material of the tool was selected to remove deposition without damaging the ESC surface. The design of the tool allows it to clean various features while remaining ergonomically friendly. The end result is an ergonomic tool that reduces the time needed to effectively clean ESCs.
ESP Spares, Inc.
300 Park Central Blvd. Ste. B
Georgetown, TX (USA) 78626
Phone: (512) 931-2701