The OEM platen shield support consists of a rubber bellows bonded to an upper and lower flange. Unfortunately, the rubber bellows is damaged or degrades over time and must be replaced. This results in unnecessary PM costs.
Platen shield supports are used in 300mm CMP tools. Three supports are used to hold a shield around the platen. The shield prevents excess slurry, as well as other materials, from spraying off of the platen as it rotates during polishing.
ESP developed a modified platen shield support complete with upper and lower FKM gaskets. The design completely removed the rubber bellows from the support, eliminating the failure mechanism. The end result is a cost savings of thousands of dollars.