​(512) 931-2701

OUR LOCATION

ESP Spares, Inc.

300 Park Central Blvd. Ste. B

Georgetown, TX (USA) 78626

Phone: (512) 931-2701

Email: sales@espspares.com

​www.espspares.com

ESP HEATER & ESC List

SOCIAL MEDIA

​The list below shows our current repair and refurbishment services offering for 150mm, 200mm, and 300mm heaters and ESCs.  ESP supports all major semiconductor equipment manufacturers including; Applied Materials (AMAT), Lam Research Corporation (LAM), and Tokyo Electron (TEL).  We are expanding our catalog daily with new refurbishment services. Please Contact Us if you cannot find what you are looking for.​

 ESP Heater & ESC Refurbishment Services  
GROUPESP P/NDescriptionOEMOEM P/N
CVD/PVD001-04324-003MCA ESC, 8", SNNF, RefurbishAMAT0010-01286
CVD/PVD001-04242-003Heater, TxZ, RefurbishAMAT0010-03244
CVD/PVD001-04308-003Heater Assy, 8", RefurbishAMAT0010-03254
CVD/PVD001-04403-003Heater, Producer, 200mm, RefurbishAMAT0010-03840
CVD/PVD001-04329-003ESC Assy, 8" SNNF, Sub Zero, RefurbishAMAT0010-04450
CVD/PVD001-04276-003Heater, WxZ, RefurbishAMAT0010-04542
CVD/PVD001-04275-003Heater, DxZ, Low Temp, RefurbishAMAT0010-05254
CVD/PVD001-04436-003DxZ Heater, 150mm RefurbishAMAT0010-05256
CVD/PVD001-04273-003Heater, DxZ, High Temp, RefurbishAMAT0010-05257
CVD/PVD001-04421-003ESC Puck, PCIIE, RefurbishAMAT0010-06875
CVD/PVD001-04490-003Heater, WxZ, RefurbishAMAT0010-11491
CVD/PVD001-04447-003ESC MCA+ Assy, SLT, LTA 200mm, RefurbishAMAT0010-12516
CVD/PVD001-04250-003Heater, B101, RefurbishAMAT0010-13626
CVD/PVD001-04362-003Pedestal, Lift, PVD PCII, RefurbishAMAT0010-13927
CVD/PVD001-04355-003Heater, 4F, 150mm, RefurbishAMAT0010-20157
CVD/PVD001-04472-003Pedestal, Lift, PVD PCII, RefurbishAMAT0010-20754
CVD/PVD001-04459-003Heater, A101, TTN, Endura, RefurbishAMAT0010-21246
CVD/PVD001-04380-003Heater Assy, 8" Endura, RefurbishAMAT0010-21356
CVD/PVD001-04366-003Heater, B101, RefurbishAMAT0010-25735
CVD/PVD001-04462-003Assy, Heater Lift, DxZ, RefurbishAMAT0010-36071
CVD/PVD001-04561-003Heater, CVD, TiN, 200mm, RefurbishAMAT0010-37784
CVD/PVD001-04249-003Heater, 4F, 200mm, RefurbishAMAT0010-70254
CVD/PVD001-04409-0038" HTHUAMAT0010-76152
CVD/PVD001-04518-003ESC, HDP, Ceramic Coated, RefurbishAMAT0040-32905
CVD/PVD008-04361-003ESC, Novellus SPEED 200mm, RefurbishNovellus02-134263-00
CVD/PVD008-04417-003ESC, Novellus SPEED 200mm, Refurbish w/Top Plate ReplacementNovellus02-134263-00
CVD/PVD008-04360-003ESC, Novellus, RefurbishNovellus02-257120-00
CVD/PVD008-04611-003ESC, Novellus, Full Refurbish with Ceramic Top Plate and Aluminum Ring ReplacementNovellus02-257120-00
CVD/PVD008-04533-003Heater, Degas Table, INOVA, RefurbishNovellus04-717892-02
Etch001-04309-002ESC, RefurbishAMAT0010-10202
Etch001-04240-002ESC, Refurbish ESC-149AMAT0010-10204
Etch001-04117-002ESC, Refurbish ESC-173AMAT0010-10327
Etch001-04388-002ESC, Poly, 200mm, RefurbishAMAT0010-10528
Etch001-04229-002ESC, Refurbish ESC-257AMAT0010-10982
Etch001-04108-002ESC, DPS Poly, RefurbishAMAT0020-39087
Etch001-04114-002ESC, Re-anodize & RefurbishAMAT0040-09961
Etch001-04369-002ESC, RefurbishAMAT0040-35854
Etch001-04545-002Chuck, SuperE Cathode, Ceramic, RefurbishAMAT0040-39990
Etch001-04468-002ESC, 200mm, RefurbishAMAT0040-77771
Etch001-04233-002ESC, 200mm, Refurbish Customer Supplied CoreAMAT0040-99949
Etch001-04499-002ESC, Poly, RefurbishAMAT0040-99959
Etch001-04574-002ESC, Refurbish & Re-anodizeAMAT0040-99961
Etch001-04172-002ESC, RefurbishAMAT0090-35133
  End of parts list 
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