​(512) 931-2701

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OUR LOCATION

ESP Spares, Inc.

300 Park Central Blvd. Ste. B

Georgetown, TX (USA) 78626

Phone: (512) 931-2701

Email: sales@espspares.com

​www.espspares.com

The list below shows our current repair and refurbishment services offering for 150mm, 200mm, and 300mm mechanical assemblies.  ESP supports all major manufacturers of semiconductor equipment including Applied Materials (AMAT), Lam Research (LAM), and Tokyo Electron (TEL). Please Contact Us if you cannot find what you are looking for.

ESP MECHANICAL ASSEMBLies PaRTS List

 ESP Mechanical Assemblies Refurbishment Services  
GroupESP P/NDescriptionOEMOEM P/N
CVD/PVD001-04626-003Assy, Wafer Lift, RefurbishAMAT0010-09180
CVD/PVD001-04577-003Assy, Susceptor, P5000, RefurbishAMAT0010-09340
CVD/PVD001-04578-003Assy, Wafer Lift, P5000, RefurbishAMAT0010-09341
CVD/PVD001-04581-003Assy, Wafer Lift, Ceramic Hoop, RefurbishAMAT0010-10033
CVD/PVD001-04252-003Lift, Wafer, RefurbishAMAT0010-20300
CVD/PVD001-04450-003Assy, Slit Valve, RefurbishAMAT0010-20664
CVD/PVD001-04449-003PVD PCII Wafer Lift, RefurbishAMAT0010-20753
CVD/PVD001-04514-003Magnet, G12, RefurbishAMAT0010-20768
CVD/PVD001-04378-003Assy, PVD Lift, RefurbishAMAT0010-70271
CVD/PVD001-04684-003Gimble, Wafer Lift Assembly, SMC Cylinder RebuildAMAT0010-70828
CVD/PVD001-04631-003Assy, Slit Valve, Ni, RefurbishAMAT0010-76392
CVD/PVD001-04338-003Assy, PVD Slit Valve Actuator, RefurbishAMAT0010-76428
CVD/PVD001-04475-003Ring, Isolator - RepairAMAT0020-22975
CVD/PVD001-04516-003Plate, Blocker, AnodizeAMAT0020-34606
CVD/PVD001-04248-003Bellows, A101, RefurbishAMAT0040-20194
CVD/PVD001-04262-003Bellows, Floating Clamp, PCII E, RefurbishAMAT0040-75751
CVD/PVD001-04657-003Rebuild, TxZ Turbo Gate Valve AssemblyAMAT0242-35628
CVD/PVD050-04532-003Assy, Gate Valve, UHV, Refurbish (VAT Ref 10846-UE24-AAM1)AMAT3870-01453
CVD/PVD041-04428-003Bellows, Heater, Refurbish S-3685AvizaA49498
CVD/PVD008-04412-003Assy, Spindle Shaft, RefurbishNovellus02-106507-00
CVD/PVD008-04445-003Bellows, Process, AR, RefurbishNovellus10-281415-00
CVD/PVD008-04534-003Bellows, Small Table, Finger Lift AssyNovellusD04-718608-01
CVD/PVD037-04563-003Bellows, MC, RefurbishOerlikon/Balzers149043/1
Diffusion030-04066-007Door, Scavenger, RefurbishASM2509628-01
Etch001-04220-002Actuator, Slit Valve, RefurbishAMAT0010-01360
Etch001-04522-002Chamber, Upper, DPS, Refurbish *Anodize and Detail Only*AMAT0010-13830
Etch001-04566-002Assy, Cathode, IPS, ESC, 200mm, RefurbishAMAT0010-39903
Etch001-04217-002Cylinder, Inner, Oxide, RefurbishAMAT0020-03658
Etch001-04215-002Cylinder, Inner, RefurbishAMAT0020-09029
Etch001-04212-002Adaptor, Top, RefurbishAMAT0020-30190
Etch001-04029-002Tube, External Ground, RefurbishAMAT0020-30198
Etch001-04211-002Cylinder, Outer, Re-anodizeAMAT0020-30347
Etch001-04529-002Chamber, Metal, DPS - Strip, Re-anodize & Ceramic CoatAMAT0020-33802
Etch001-04236-002Chamber, DPS, Ceramic Coat, RefurbishAMAT0020-33802
Etch001-04501-002Chamber, DPS Poly, RefurbishAMAT0020-33806
Etch001-04143-002Upper Chamber BodyAMAT0021-01421
Etch001-04012-002Liner, Cathode, RefurbishAMAT0021-09104
Etch001-04039-002Plate, Throttle Valve Chasiss, RefurbishAMAT0021-09550
Etch001-04040-002Plunger, Throttle Valve Chassis, RefurbishAMAT0021-09552
Etch001-04024-002Liner, Slit Valve, RefurbishAMAT0021-09718
Etch001-04047-002Liner, Chamber, RefurbishAMAT0021-10223
Etch001-04625-002Adapter, Top, Mark II, RefurbishAMAT0021-39905
Etch001-04213-002Liner, Chamber, RefurbishAMAT0040-09002
Etch001-04166-002Bellows, TVA, RefurbishAMAT0040-32204
Etch025-04536-002Chamber Body, GeminiES, RefurbishAxcelis419631
Etch009-04086-002Bellows, Linear feed through Actuator- RefurbishGasonics996366/90-3036
Etch002-04510-002Electrode, Extended, RefurbishLAM715-059674-005
Etch002-04132-002Shield, CFA RefurbishLAM715-330825-007
Etch002-04511-002Liner, Lower, RefurbishLAM715-801021-838
Etch050-04641-002VAT Valve Rebuild Decontamination and Refurbishment (VAT Ref 64246-XE52-1111)LAM796-091902R004
Etch003-04198-002Plate, Baffle, Refurbish w/YttriaTELES1D10-102848-13
Etch003-04081-002Cover, Bellows, 6.5", RefurbishTELES1D10-202292-11
Etch003-04195-002Electrode, Upper, Refurbish w/YttriaTELES1D10-204338-13
Etch003-04512-002Cover, Bellows, Refurbish w/YttriaTELES1D10-204418-11
Etch003-04200-002Cover, Bellows, Refurbish w/YttriaTELES1D10-204419-12
Etch003-04082-002Shield, Depo, RefurbishTELES1D10-308540-11
Etch003-04197-002Shield, Depo, Refurbish w/YttriaTELES1D10-315183-15
Etch053-04658-002Valve, Throttle Valve, ButterflyTylan GeneralMDV-018S01
Etch053-04659-002Valve, Throttle Valve, ButterflyTylan GeneralMDV-100B
Etch053-04633-002Valve, Throttle (Butterfly), RefurbishTylan GeneralMDVX-100BS11
Etch050-04646-002Rebuild, VAT 5" Gate ValveVAT64040-PE52-1009
Implant025-04223-004Bellows, Wafer Holder, Lg, RefurbishAxcelis1906890
Implant025-04222-004Bellows, Wafer Holder, Sm, RefurbishAxcelis1906900
Implant025-04157-004Bellows, V3, RefurbishAxcelis17161640
Implant028-04663-004Manipulator Control, E11290090, RefurbishVarianE11290090
Implant028-04131-004Bellows, Beamgate, RefurbishVarianE17094630
Metrology020-04599-009Paddle, Robot, OP5000 - Repair & Re-anodizeKLA56-010559
Metrology020-04513-009Paddle, EFD, Kawasaki RobotKLA56-080720
Misc050-04527-000Bellows, Actuator, Gate Valve, Repair w/Seal Kit and Actuator SealVAT90207-R1/241/2
  End of parts list 

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